发明名称 WAFER CUTTING METHOD AND DEVICE
摘要 A device for cutting a wafer provided with grooves on its upper surface having its lower surface supported by a flexible film secured to a frame. This device includes a system for locating the grooves and for positioning the frame with respect to a cutting system, and setting means for positioning the wafer in front of the locating system so that the located area is at a determined distance from the locating system.
申请公布号 US2013192435(A1) 申请公布日期 2013.08.01
申请号 US201313754660 申请日期 2013.01.30
申请人 STMICROELECTRONICS (TOURS) SAS;STMICROELECTRONICS (TOURS) SAS 发明人 JARRY VINCENT;PRUNET PHILIPPE;FEUILLETTE THIERRY
分类号 H01L21/463;B28D5/04 主分类号 H01L21/463
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