| 摘要 |
PROBLEM TO BE SOLVED: To provide an exfoliating device, an exfoliating system, an exfoliating method and an exfoliating program capable of properly exfoliating a substrate.SOLUTION: An exfoliating device according to an embodiment comprises a first holding section, a second holding section, and a moving mechanism. The first holding section suction-holds a first substrate. The second holding section is provided with a suction section that suction-holds one part of a second substrate jointed to the first substrate, on one end side. The moving mechanism moves one end side of the second holding section in a direction away from the first holding section with the other end side as a fulcrum while the first substrate is suction-held by the first holding section. |
