发明名称 |
OPTICAL PYROMETER AND APPARATUS FOR PROCESSING SEMICONDUCTOR BY EMPLOYING THE SAME |
摘要 |
An optical pyrometer includes a receiving part having a receiving end for receiving light radiation of a heating unit, and a case part covering the receiving part, except for the receiving end of the receiving part, wherein a cross-sectional area of the receiving end of the receiving part perpendicular to a lengthwise direction of the receiving end of the receiving part decreases toward an end portion of the receiving end of the receiving part.
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申请公布号 |
US2013193131(A1) |
申请公布日期 |
2013.08.01 |
申请号 |
US201213706146 |
申请日期 |
2012.12.05 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD.;SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
HUR IN-HOE;SHIN DONG-MYUNG;HONG JONG-PA;KIM CHOO-HO;JI WON-SOO;KIM JUN-WOO |
分类号 |
G01J5/00;H05B1/00 |
主分类号 |
G01J5/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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