| 摘要 |
PURPOSE: Cerium oxide nanopowder with the uniform particle size and distribution and a method for manufacturing the same are provided to adequately function as a chemical-mechanical polishing material by being pulverized using specific copolymer. CONSTITUTION: Copolymer includes a main chain induced from ionic polymer and a plurality of branched chains induced non-ionic polymer. The slurry of cerium oxide powder is pulverized under the copolymer. The main chain and the branched chains form a comb shape. The average particle size of the cerium oxide in the pulverized cerium oxide nanopowder is lower than or equal to 100nm, based on the volume average of the cerium oxide. Cerium oxide with the 50 to 100nm of particle sizes is included in the pulverized cerium oxide nanopowder. |
