| 摘要 |
PURPOSE: A manufacturing method of a low temperature co-fired ceramics(LTCC) substrate is provided to provide substrates with excellent flatness and flexibility by attaching a support layer with high sintering temperature to the LTCC substrate. CONSTITUTION: A manufacturing method of an LTCC substrate comprises a step of manufacturing a plurality of LTCC substrate with a sintering temperature of 900>= or less; a step of manufacturing one or more support layer sheets with a sintering temperature of 1150>= or more; a step of forming an electrocircuit pattern on each side of the LTCC sheets; a step of forming a sub-assembly by laminating the LTCC sheets; a step of forming an assembly by attaching one or more support layer sheets on the upper side of lower side of the sub assembly; a step of sintering the assembly at 900>= or less; and a step of removing the support layer sheet from the sintered assembly. [Reference numerals] (s201) Manufacturing each LTCC sheet; (s202) Printing a circuit pattern on each LTCC sheet side; (s203) Forming vias and electrodes on each LTCC sheet side; (s204) Laminating each LTCC sheet; (s205) Laminating the support layer sheets; (s206) Simultaneously sintering; (s207) Removing supporting layer sheets; (s208) Polishing the surface of an LTCC substrate; (s211) Manufacturing supporting layer sheets; |
