发明名称 MANUFACTURING METHOD OF SEMICONDUCTOR DEVICE AND SEMICONDUCTOR DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a manufacturing method of a semiconductor device which obtains a high adhesion force between a resin mold layer and a wiring layer/post electrode without generating voids in a resin mold layer and is excellent in the reliability, and to provide the semiconductor device obtained by the manufacturing method of the semiconductor device.SOLUTION: A resist pattern is formed on a wiring layer 4 and an interlayer dielectric film 3 exposed from the wiring layer 4, and a metal material is laminated on the wiring layer 4 using the resist pattern as a mask to form post electrodes 5. Then, a first resin coating part 61 is formed so as to cover each connection part C between the wiring layer 4 and the post electrode 5. A resin mold layer 7 is formed so as to seal a side part of each post electrode 5, the first resin coating parts 61, the wiring layer 4, and the interlayer dielectric film 3 exposed from the wiring layer 4 with a resin material while a top part 5a of each post electrode 5 is exposed.
申请公布号 JP2013149913(A) 申请公布日期 2013.08.01
申请号 JP20120011167 申请日期 2012.01.23
申请人 YAMAHA CORP 发明人 SAITO HIROSHI
分类号 H01L23/12;H01L23/29;H01L23/31 主分类号 H01L23/12
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