CORRECTION OF MICROMIRROR ARRAY

摘要

PROBLEM TO BE SOLVED: To provide a method for determining voltage-gradient angle characteristics of a micromirror array.SOLUTION: A method includes the steps of: a) defining many reference gradient angles measured on each of the micromirror elements in a neutral state in a micromirror array; b) determining the capacitance value of each micromirror element corresponding to each reference gradient angel; c) determining the capacitance value-gradient angle characteristics of each micromirror element through interpolation of the measured capacitance values among a plurality of reference gradient angles of each micromirror element; d) applying a sweep voltage to each micromirror element and concurrently measuring the capacitance value of each micromirror element during the voltage sweep; and e) determining the voltage-gradient angle characteristics using the measured capacitance value. In the step e), the measured capacitance is matched to the determined capacitance and the applied voltage during the voltage sweep is correlated to the gradient angle for the matched capacitance value.