| 摘要 |
PROBLEM TO BE SOLVED: To provide an exfoliating device, an exfoliating system, an exfoliating method and an exfoliating program capable of properly exfoliating a substrate.SOLUTION: An exfoliating device according to an embodiment comprises a first holding section, a second holding section, and a moving mechanism. The first holding section suction-holds a first substrate, and the second holding section suction-holds a second substrate jointed to the first substrate. The moving mechanism moves the second holding section in a direction away from the first holding section. The second holding section is constituted to be divided into a main suction section and a sub-suction section. The main suction section suction-holds a first region including a center part of the second substrate. The sub-suction section sucks a second region including one part or an entire part of an outer periphery of the second substrate, and pulls the second region of the second substrate suction-held by the main suction section in a direction away from the first substrate. |
