| 摘要 |
A physical quantity sensor includes a substrate, an oscillating member that is disposed over the substrate, support portions that support the oscillating member and that are disposed along a first axis, and detection electrodes that are disposed on the substrate so as to oppose the oscillating member. The oscillating member has a pair of side faces intersecting a second axis perpendicular to the first axis in a plane, and a protrusion is formed on at least one of the pair of side faces.
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