| 摘要 |
An inspecting apparatus includes an image pickup unit configured to pick up a plurality of images of an inspection target object with different exposure times and generate, image data of an inspection target object image including an inspection region, a weighted-image-data generating unit configured to weight, for each of the image data generated with the exposure times different from one another, data of pixels indicating a region where a difference in gradation of pixel values is relatively large among regions of pixels included in the image data and generate weighted image data, an image-data combining unit configured to generate combined image data obtained by combining the generated respective weighted image data, and a determining unit configured to determine a state of the inspection region on the basis of image data of a reference image set and the generated combined image data.
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