PHOTOVOLTAIC DEVICE, METHOD FOR MANUFACTURING SAME, AND PHOTOVOLTAIC MODULE

摘要

A photovoltaic device is formed by stacking an intrinsic oxygen-containing amorphous silicon layer, an impurity-doped conductive amorphous silicon layer, and a transparent conductive layer in this order directly on a single-crystal silicon substrate of one conductivity type. Crystal particles, the area of which in the surface direction of the single-crystal silicon substrate increases beginning at the surface of the single-crystal silicon substrate and reaching the transparent conductive layer, are scattered inside the intrinsic oxygen-containing amorphous silicon layer and the conductive amorphous silicon layer. This can obtain a photovoltaic device excellent in a photoelectric conversion efficiency.