发明名称 |
POLYIMIDE PRECURSOR AND RESIN COMPOSITION USING SAME |
摘要 |
<p>Provided is a polyimide precursor that has a constitutional unit represented by formula (I) and has an amino group on a part of a terminal group, wherein an integrated value of a peak (A) in the 1H-NMR spectrum, which indicates a hydrogen atom attached to a carbon atom next to the carbon atom to which the amino group is attached, is 3 to 8% of an integrated value of a peak (B) in the 1H-NMR spectrum, which indicates a hydrogen atom in an amide bond of the polyimide precursor. In formula (I), A1 and A2 are each a benzene ring, a group in which two benzene rings are connected by a single bond, or a group in which two or more aromatic rings are connected by -O-, -S- or -CO-. R is each a hydrogen atom or an alkyl group. A1 and A2 may each have a substituted group. (I)</p> |
申请公布号 |
WO2013111241(A1) |
申请公布日期 |
2013.08.01 |
申请号 |
WO2012JP08271 |
申请日期 |
2012.12.25 |
申请人 |
HITACHI CHEMICAL DUPONT MICROSYSTEMS, LTD.;KAWAMURA, TOMOKO;SUZUKI, KEIKO;ABE, SATOSHI |
发明人 |
KAWAMURA, TOMOKO;SUZUKI, KEIKO;ABE, SATOSHI |
分类号 |
C08G73/10;H01L21/312;H01L21/768;H01L23/14;H01L23/532 |
主分类号 |
C08G73/10 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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