Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method

摘要

An illumination optical apparatus has an optical unit (3). The optical unit has a light splitter (35) to split an incident beam into two beams; a first spatial light modulator (33) which can be arranged in an optical path of a first beam; a second spatial light modulator (34) which can be arranged in an optical path of a second beam; and a light combiner (36) which combines a beam having passed via the first spatial light modulator, with a beam having passed via the second spatial light modulator; each of the first spatial light modulator and the second spatial light modulator has a plurality of optical elements (33a, 34a) arranged two-dimensionally and controlled individually.