发明名称 |
POSITIVE-TYPE PHOTOSENSITIVE RESIN COMPOSITION, METHOD FOR PRODUCING RESIST PATTERN, SEMICONDUCTOR DEVICE, AND ELECTRONIC DEVICE |
摘要 |
<p>The positive tone photosensitive composition of the invention comprises an alkali-soluble resin having a phenolic hydroxyl group, a compound producing an acid by light, a thermal crosslinking agent and an acrylic resin. It is possible to provide a positive tone photosensitive composition that can be developed with an aqueous alkali solution, has sufficiently high sensitivity and resolution, and can form a resist pattern with excellent adhesiveness and thermal shock resistance.</p> |
申请公布号 |
KR20130086258(A) |
申请公布日期 |
2013.07.31 |
申请号 |
KR20137016531 |
申请日期 |
2009.12.16 |
申请人 |
HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
MATSUTANI HIROSHI;UENO TAKUMI;NICOLAS ALEXANDRE;YAMASHITA YUKIHIKO;NANAUMI KEN;TANIMOTO AKITOSHI |
分类号 |
G03F7/039;G03F7/023;G03F7/40;H01L21/027 |
主分类号 |
G03F7/039 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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