| 摘要 |
Abstract Ultrasonic Cleaning MethodSubject: An ultrasonic cleaning method allowing a high particle removal efficiency to be achieved with stability is provided.Solving Means: The ultrasonic cleaning method is for irradiating ultrasonic waves to a solution having gas dissolvedtherein for cleaning an object to be cleaned in the solution. The method includes the following steps. Ultrasonic waves are irradiated to the solution having the first dissolved gas concentration. In the state where ultrasonic waves are irradiated to the solution, the dissolved gas concentration in the solution is changed from the first dissolved gas concentration to the second dissolved gas concentration lower than the first dissolved gas concentration. Sonoluminescence occurs by irradiating ultrasonic waves to the solution while the dissolved gas concentration in the solution is changed fromthe first dissolved gas concentration to the second dissolved gas concentration.Fig. 4 |
