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发明名称
摘要
申请公布号
JP5253460(B2)
申请公布日期
2013.07.31
申请号
JP20100158033
申请日期
2010.07.12
申请人
发明人
分类号
H01L21/8242;H01L21/28;H01L21/768;H01L27/108
主分类号
H01L21/8242
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