发明名称 SPUTTERING TARGET FOR MAGNETIC RECORDING FILM, AND PROCESS FOR PRODUCTION THEREOF
摘要 37 PCT/JP2011/073993A sputtering target for a magnetic recording film containing 8102, wherein apeak strength ratio of a (011) plane of quartz relative to a background strength (i.e. 5 quartz peak strength/background strength) in an X-ray diffraction is 1.40 or more. An object of this invention is to obtain a sputtering target for a magnetic recording film capable of inhibiting the formation of cristobalites in the target which cause the generation of particles during sputtering, shortening the burn-in time, magnetically and finely separating the single-domain particles after deposition, and improving the 10 recording density.[Selected Drawing] Fig. 1
申请公布号 SG190773(A1) 申请公布日期 2013.07.31
申请号 SG20130035464 申请日期 2011.10.19
申请人 JX NIPPON MINING & METALS CORPORATION 发明人 OGINO SHIN-ICHI;NARA ATSUSHI;TAKAMI HIDEO
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