发明名称 |
Semiconductor device and production method |
摘要 |
The object to provide a semiconductor device comprising a highly-integrated SGT-based CMOS inverter circuit is achieved by forming an inverter which comprises: a first transistor (148) including; an first island-shaped semiconductor layer (105a); a first gate insulating film (124a); a gate electrode (125); a first first-conductive-type high-concentration semiconductor layer (121) arranged above the first island-shaped semiconductor layer (105a); and a second first-conductive-type high-concentration semiconductor layer (120) arranged below the first island-shaped semiconductor layer (105a), and a second transistor (149) including; a second gate insulating film (124b) surrounding a part of the periphery of the gate electrode (125); a second semiconductor layer (103A) in contact with a part of the periphery of the second gate insulating film (124A); a first second-conductive-type high-concentration semiconductor layer (117) arranged above the second semiconductor layer (103A); and a second second-conductive-type high-concentration semiconductor layer (118) arranged below the second semiconductor layer (103A). |
申请公布号 |
EP2284878(A3) |
申请公布日期 |
2013.07.31 |
申请号 |
EP20100008387 |
申请日期 |
2010.08.11 |
申请人 |
UNISANTIS ELECTRONICS SINGAPORE PTE. LTD. |
发明人 |
MASUOKA, FUJIO;NAKAMURA, HIROKI |
分类号 |
H01L21/8238;H01L21/84;H01L27/092;H01L27/12 |
主分类号 |
H01L21/8238 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|