发明名称 Optical mirror assembly for beam guidance and mirror tempering device with such a mirror assembly
摘要 The optical mirror component (2) has a mirror base (6) which supports a reflecting surface (5). The solid foam regions (9,10) of mirror base are arranged below the reflecting surface and are in heat-conducting connection with reflective surface. The solid foam regions are connected to a fluid source (4) via fluid channels (27,29,32,33,36,37) and fluid connection portions (14-17), so that the heat exchange fluid is supplied from the fluid source to the solid foam regions. An independent claim is included for mirror temperature control device.
申请公布号 EP2620795(A1) 申请公布日期 2013.07.31
申请号 EP20120196128 申请日期 2012.12.07
申请人 CARL ZEISS SMT GMBH 发明人 LAUFER, TIMO;KNEER, ARON
分类号 G02B7/18 主分类号 G02B7/18
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