| 摘要 |
<P>PROBLEM TO BE SOLVED: To improve identification performance in a measurement domain in a three-dimensional measurement method and an apparatus using the method by eliminating influence due to blurs in imaging to rapidly and accurately measure a three-dimensional shape in the measurement domain. <P>SOLUTION: The three-dimensional shape in the measurement domain is measured by carrying out a step (S1) of evaluating in advance a compensation relation between a brightness differential value wherein a brightness value distribution obtained from an image in the measurement domain of an object to be measured is differentiated in a direction orthogonal to a fringe pattern and a phase correction value to correct the influence given by difference in reflectivity of the object to a phase value obtained from the fringe pattern, projecting predetermined light to the object for imaging and acquiring a predetermined pickup image, a step (S2) of creating a differential image for image brightness, a step (S3) of calculating the phase value of the fringe pattern, a step (S4) of correcting an error in the phase value of the fringe pattern due to the blur of the pickup image, and a step of calculating a three-dimensional coordinate of a position of a pixel of the image. <P>COPYRIGHT: (C)2009,JPO&INPIT |
