| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide an exposure device that suppresses occurrence of an exposure defect. <P>SOLUTION: The exposure device includes an optical member for emitting exposure light, a movable member capable of moving in a predetermined plane including an irradiation position of the exposure light emitted from the optical member, a scale member disposed at at least a part of a periphery of an optical path of the exposure path, a measurement system including an encoder head disposed at the movable member to face the scale member, and measuring position information on the movable member, and a detection system for detecting the position relation between the optical member and scale member. <P>COPYRIGHT: (C)2010,JPO&INPIT |
