| 摘要 |
A charge transfer mechanism is used to locally deposit material or remove material to alter for a small structure, such as a part of an integrated circuit (114, 1100). A local electrochemical cell (110) is created without having to immerse the entire work piece in a bath. The charge transfer mechanism can be used together with a charged particle beam (702, 802, 902) or laser system to modify small structures, such as integrated circuits or micro-electromechanical system. The charge transfer process can be performed in air or, in some embodiments, in a vacuum chamber (700). |
