发明名称
摘要 Provided is a gas-dissolved water supply system that can efficiently produce highly concentrated gas-dissolved water and can circulate and supply the water to a use point. To a storage tank 1, waste water (cleaning waste water) that is water containing dissolved gas (oxygen) used for cleaning an object to be cleaned is reserved through piping 15, and feeding water is supplied through feeding water piping 1a. The water in the storage tank 1 is sent to a purification device 4 via a pressure feeding pump 2 and a heat exchanger 3 for keeping the water temperature constant. The water from which foreign substances are removed by the purification device 4 is sent to a degasser 6 via a flowmeter 5. Then, a gas is dissolved in the water by a gas-dissolving apparatus 7, a chemical is added to the water, and the water is supplied to a use point.
申请公布号 JP5251184(B2) 申请公布日期 2013.07.31
申请号 JP20080066269 申请日期 2008.03.14
申请人 发明人
分类号 B08B3/08;H01L21/304 主分类号 B08B3/08
代理机构 代理人
主权项
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