Droplet-ejecting head, droplet-ejecting apparatus, and piezoelectric element

摘要

A droplet-ejecting head includes a substrate including a pressure chamber communicating with a nozzle hole and also includes a piezoelectric element (100) that includes a lower electrode (10), a piezoelectric layer (12) which overlies the lower electrode and which is made of perovskite-type oxide, and an upper electrode (14) overlying the piezoelectric element and that causes a change in pressure in a liquid contained in the pressure chamber. The piezoelectric layer includes a first piezoelectric sub-layer (12a) located on the lower electrode side and a second piezoelectric sub-layer (12b) located between the first piezoelectric sub-layer and the upper electrode. The first piezoelectric sub-layer has a polarization axis predominantly directed in an in-plane direction of the first piezoelectric sub-layer. The second piezoelectric sub-layer is predominantly (100)-oriented in the pseudocubic coordinate system.