发明名称 |
Particle generation factor determining system, charging method and storage medium |
摘要 |
Provided is a charging method capable of offering a user an incentive to use a particle generation factor determining system. In the particle generation factor determining system including a user interface device 11 through which a user inputs a particle map and a server 13, the server 13 calculates accuracy of each of multiple particle generation factors based on the particle map; the user interface device 11 displays the calculated accuracy or a title of generation-factor-relevant information 27 on each particle generation factor corresponding to this accuracy; the server 13 provides the generation-factor-relevant information 27 to the user interface device 11; a charged fee for providing particle generation-factor-relevant information 27 is determined based on accuracy of a particle generation factor corresponding to the provided generation-factor-relevant information 27.
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申请公布号 |
US8498911(B2) |
申请公布日期 |
2013.07.30 |
申请号 |
US20100820692 |
申请日期 |
2010.06.22 |
申请人 |
MORIYA TSUYOSHI;TOKYO ELECTRON LIMITED |
发明人 |
MORIYA TSUYOSHI |
分类号 |
G06Q40/00;G01N21/956;H01L21/02;H01L21/66 |
主分类号 |
G06Q40/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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