发明名称 Particle generation factor determining system, charging method and storage medium
摘要 Provided is a charging method capable of offering a user an incentive to use a particle generation factor determining system. In the particle generation factor determining system including a user interface device 11 through which a user inputs a particle map and a server 13, the server 13 calculates accuracy of each of multiple particle generation factors based on the particle map; the user interface device 11 displays the calculated accuracy or a title of generation-factor-relevant information 27 on each particle generation factor corresponding to this accuracy; the server 13 provides the generation-factor-relevant information 27 to the user interface device 11; a charged fee for providing particle generation-factor-relevant information 27 is determined based on accuracy of a particle generation factor corresponding to the provided generation-factor-relevant information 27.
申请公布号 US8498911(B2) 申请公布日期 2013.07.30
申请号 US20100820692 申请日期 2010.06.22
申请人 MORIYA TSUYOSHI;TOKYO ELECTRON LIMITED 发明人 MORIYA TSUYOSHI
分类号 G06Q40/00;G01N21/956;H01L21/02;H01L21/66 主分类号 G06Q40/00
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