发明名称 |
Method and apparatus for preventing catastrophic contact failure in ultra high temperature piezoresistive sensors and transducers |
摘要 |
A piezoresistive sensor device and a method for making a piezoresistive device are disclosed. The sensor device comprises a silicon wafer having piezoresistive elements and contacts in electrical communication with the elements. The sensor device further comprises a contact glass coupled to the silicon wafer and having apertures aligned with the contacts. The sensor device also comprises a non-conductive frit for mounting the contact glass to a header glass, and a conductive non-lead glass frit disposed in the apertures and in electrical communication with the contacts. The method for making a piezoresistive sensor device, comprises bonding a contact glass to a silicon wafer such that apertures in the glass line up with contacts on the wafer, and filling the apertures with a non-lead glass frit such that the frit is in electrical communication with the contacts. The use of a lead free glass frit prevents catastrophic failure of the piezoresistive sensor and associated transducer in ultra high temperature applications.
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申请公布号 |
US8497757(B2) |
申请公布日期 |
2013.07.30 |
申请号 |
US20100686990 |
申请日期 |
2010.01.13 |
申请人 |
KURTZ ANTHONY D.;NED ALEXANDER;KULITE SEMICONDUCTOR PRODUCTS, INC. |
发明人 |
KURTZ ANTHONY D.;NED ALEXANDER |
分类号 |
G01L1/22 |
主分类号 |
G01L1/22 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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