| 摘要 |
<p>The invention relates to materials made of biocompatible thin layers as multilayer coatings consisting of alternating binary carbides or nitrides and quaternary carbo-nitrides of biocompatible transition metals, such as Ti, Zr, Nb, Ta, Hf, for biomedical applications, which are obtained by vapour-phase deposition, using the magnetron sputtering or the cathodic arc, in a reactive plasma which may contain Ti, Zr, Nb, Ta, Hf, N and/or C atoms or ions, depending on the nature of the deposited materials. According to the invention, the materials comprise 4...1000 individual alternating layers of TiN, ZrN, NbN, TaN, HfN or TiC, ZrC, NbC, TaC, HfC and TiZrCN, TiHfCN, TiTaCN, TiNbCN, ZrHfCN, ZrTaCN, ZrNbCN, TaHfCN, TaNbCN or NbHfCN, having thicknesses in the range of 20...250 nm, the individual layers thickness ratio in the range of 0.4...2 and a total thickness of the multilayer coating in the range of 1...4μm, with good adherence to the substrate, the normal critical forces measured upon the endurance scratch test being of 28...52 N, with a microhardness in the range of 18...32 GPa, exhibiting an average roughness < 10 nm and the value of the cell viability factor in the range of 87...96% upon the toxicity test.</p> |
