| 摘要 |
PURPOSE: A water marking system is provided to irradiate a laser beam to a precise location by adjusting a position of the system by moving a stage. CONSTITUTION: A precise stage linearly moves in X-axis and Y-axis and rotates with respect to Z-axis as a rotation shaft to move a marking position to a laser irradiation position. Vacuum grooves of a circle shape are formed in the stage in a hook shape. An attenuator controls intensity from outside a laser. A camera adapter is attached between a scanner and the attenuator and monitors a position where the laser falls down on a substrate. [Reference numerals] (AA) F-theta lens correction: 1 μm → 0 μm |
