发明名称 PROCESSING APPARATUS AND CLEAN SYSTEM INCLUDING PROCESSING APPARATUS
摘要 A clean system is provided with a room, which has a ceiling surrounding a chamber and a floor; a blower, which communicates with the chamber, cleans the air in the chamber and supplies clean air; an apparatus main body arranged to receive the clean air; a table, which supports the apparatus main body, hermetically surrounds a space with the floor to be ventilated, and has an intake port which communicates with the space and a suction fan which introduces the clean air passed through the apparatus main body into the space through the intake port; and a circulation duct, which is hermetically connected to the table and the ceiling to permit the space to communicate with the chamber.
申请公布号 KR101289367(B1) 申请公布日期 2013.07.29
申请号 KR20107002389 申请日期 2008.07.03
申请人 发明人
分类号 F24F7/06;H01L21/67 主分类号 F24F7/06
代理机构 代理人
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