发明名称 VIBRATOR ELEMENT, SENSOR UNIT, ELECTRONIC APPARATUS, MANUFACTURING METHOD OF VIBRATOR ELEMENT AND MANUFACTURING METHOD OF SENSOR UNIT
摘要 PURPOSE: A vibration piece, a sensor unit, an electronic device, a manufacturing method of the vibration piece, and a manufacturing method of the sensor unit are provided to remove or add a part of an adjusting unit of a second vibration arm, thereby removing and suppressing the leakage output of the vibration of the first vibration arm. CONSTITUTION: A vibrating piece is comprised of a base unit (21), the first vibration arms (22a,22b,23a,23b), the second vibration arms (25a,25b), and an adjusting unit. The first vibration arm and the second vibration arm are presented from the base unit. The adjusting unit is formed on the second vibration arm. An output signal of the second vibration arm is the reversed phase to an output signal of the leakage vibration of the first vibration arm.
申请公布号 KR20130085399(A) 申请公布日期 2013.07.29
申请号 KR20130075399 申请日期 2013.06.28
申请人 SEIKO EPSON CORPORATION 发明人 OGURA SEIICHIRO;KIKUCHI TAKAYUKI
分类号 G01C19/56;G01C19/5607;G01C19/5621;G01C19/5628;H01L41/08;H01L41/09;H01L41/18;H01L41/187;H01L41/22;H01L41/23;H01L41/253;H01L41/29;H01L41/332 主分类号 G01C19/56
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