| 摘要 |
PURPOSE: A mobile exhaust device for a semiconductor manufacturing device is provided to effectively prevent leakage of contaminated gas by ventilating the contaminated gas discharged from a chamber using an intake hood. CONSTITUTION: A wheel is installed on the lower part of a main body (10). An exhaust pump (20) is installed in the main body. An intake pipe (22) forms an intake path, and one end is connected to the exhaust pump. An intake hood (30) is connected to the other side of the intake pipe and conducts intake around an opening part of a chamber. The intake hood includes a body, a plurality of intake inlets, and an intake outlet.
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