DIMPLE INSPECTION SYSTEM AND INSPECTION METHOD USING THE SAME

摘要

PURPOSE: A dimple inspecting system and an inspecting method using the same are provided to increase the effectiveness of inspection by determining a defect without breaking an inspecting object. CONSTITUTION: An optical source illuminates light to a sample. An imaging part (130) receives reflection light. A control part (120) performs control. A display part (125) is connected to the control part. The display part displays inspection information for the sample. [Reference numerals] (120) Control unit