| 摘要 |
An apparatus and a method for calculating representative values are provided. The apparatus includes a first calculation unit which calculates a median value and a median absolute deviation (MAD), or a mean value and a standard deviation of process condition values for each sampling point, by using the process condition values which have been measured through a sensor for the each sampling point for each sample; a second calculation unit which calculates standardized values by using the process condition values, the median value, and the median absolute deviation (MAD), or calculates standardized values by using the process condition values, the mean value, and the standard deviation; and a third calculation unit which calculates a representative value of the process condition values for the each sample based on the calculated standardized values. |
