| 摘要 |
PURPOSE: A method for measuring defects inside a transparent crystal of a cylindrical shape is provided to detect defected portions based on an average value of lightness after dividing measured image into a plurality of domains, thereby minimizing the influence of light scattering possible to generate in an edge portion. CONSTITUTION: A method for measuring defects inside a transparent crystal of a cylindrical shape is as follows. Laser is irradiated to a crystal(100). Images of the entire crystal in a direction vertical to a laser irradiating direction is obtained(200). A bright defected spot generated by light scattering is detected(300). [Reference numerals] (100) Laser irradiating step; (200) Image obtaining step; (300) Defected spot detecting step; (400) Share displaying step |
