| 摘要 |
PROBLEM TO BE SOLVED: To provide high levels of splashguard function, while allowing flow of chemical precursor under high flow rate, high vacuum or high pressure difference conditions.SOLUTION: This invention relates to a container including a diptube inlet, at least one baffle disc, and an annular projecting deflector. The baffle disc is positioned between the outlet of the diptube and the outlet of the container so as to form a narrow annular space between the baffle disc and a sidewall of the container to minimize liquid droplets entering the outlet of the container. The projecting deflector is provided in the vicinity of the baffle disc on the sidewall so as to project radially inward. This invention also relates to a process of delivering a chemical precursor from a container having the structure. Liquid and vapor delivery are both contemplated. |
