ORGANIC EL SEALING FILM, ORGANIC EL ELEMENT, AND ORGANIC EL SEALING FILM MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an organic EL sealing film which has barrier properties equivalent to those of a sealing film formed by sequentially depositing an SiN film, an intermediate film, and an SiN film and has a thin structure that is not provided with the intermediate film, and to provide an organic EL element and an organic EL sealing film manufacturing method.SOLUTION: An organic EL sealing film 20 includes: a first layer silicon nitride film 21 which is deposited on a silicon nitride deposited surface 7S of an organic EL substrate 7; and a second layer silicon nitride film 22 deposited on a surface 21S of the first layer silicon nitride film 21 after the surface 21S is subject to passivation.