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发明名称
摘要
The present invention relates to a method for covering Atomic Force Microscopy (AFM) tips by depositing a material in the form of nanoparticles with an aggregate source.
申请公布号
JP2013530390(A)
申请公布日期
2013.07.25
申请号
JP20130509581
申请日期
2011.05.04
申请人
发明人
分类号
G01Q60/42
主分类号
G01Q60/42
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