| 摘要 |
PROBLEM TO BE SOLVED: To provide an oxide sputtering target for forming a protective film for an optical recording medium, excellent in storage preserving property, capable of forming a hardly breakable soft film, enabling DC sputtering and scarcely causing particles; and a protective film for an optical recording medium manufactured using the same.SOLUTION: An oxide sputtering target includes, based on the total amount of metallic elements, ≥0.15 at% of In, ≥7 at% of Si, ≤39 at% in total of In and Si, and the balance of Zn and inevitable impurities. |
