发明名称 METHOD FOR PRODUCING RECONSTITUTED WAFERS WITH SUPPORT OF THE CHIPS DURING THEIR ENCAPSULATION
摘要 <p>The invention relates to a method for the collective production of a reconstituted wafer that comprises chips with connection pads on a so-called front side of the chip, said method comprising a step of: A) placing the chips on an initial adhesive carrier, front side on the carrier, characterized in that it comprises the following steps: B) depositing, in the gaseous phase at atmospheric pressure and at room temperature, an electrically insulating layer on the initial carrier and the chips, this layer having a mechanical role in supporting the chips; C) transferring the chips covered with the mineral layer to a temporary adhesive carrier, the rear side of the chips facing the temporary adhesive carrier; D) removing the initial adhesive carrier; E) placing the chips on a chuck, the front sides of the chips facing the chuck; F) removing the temporary adhesive carrier; G) depositing a resin over the chuck so as to encapsulate the chips, then curing the resin; H) removing the chuck; and I) producing an RDL on the active side.</p>
申请公布号 WO2012152672(A4) 申请公布日期 2013.07.25
申请号 WO2012EP58195 申请日期 2012.05.04
申请人 3D PLUS;VAL, CHRISTIAN 发明人 VAL, CHRISTIAN
分类号 H01L23/538;H01L21/56;H01L21/60;H01L23/31;H01L23/48 主分类号 H01L23/538
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