| 摘要 |
<p>Provided is an X-ray diffractometer that enables X-ray diffraction measurement using a plurality of types of characteristic X-rays under a common environment. The present invention, which includes an X-ray source emitting the plurality of types of characteristics X-rays, and a multi-layer mirror selectively reflecting the plurality of types of characteristic X-rays from the X-rays emitted by the X-ray source, comprises an optical system causing the X-rays reflected by the multi-layer mirror to be incident on a sample, and an X-ray detector detecting a diffracted X-ray generated from the sample. In the X-ray diffractometer, the multi-layer mirror comprises a plurality of types of multilayers respectively corresponding to the plurality of types of characteristic X-rays. The plurality of types of multilayers are laminated in order to constitute a curved reflective surface. Each of the multilayers comprises a lattice spacing selectively reflecting the corresponding characteristic X-ray, and the lattice spacing is inclined along a line of intersection with an incident surface of the curved reflective surface.</p> |
