发明名称 OPTICAL INTERFERENCE OBSERVATION DEVICE
摘要 PROBLEM TO BE SOLVED: To provide an optical interference observation device capable of observing and measuring a three-dimentional object such as a biological sample or a fine uneven surface shape.SOLUTION: The optical interference observation device for observing a structure of an observation object, comprises: a light source that emits light having a plurality of wavelengths; an illumination optical system that splits the light from the light source into reference light and illumination light to irradiate the observation object with the illumination light from at least two directions; a detection unit that allows measurement light including structure information of the observation object, the measurement light being generated by irradiating the observation object with the illumination light to interfere with the reference light, and detects first and second interference light generated by interference between the measurement light and the reference light generated by the irradiation from the two directions, respectively; and an image data processing unit that generates image data on the basis of the first interference light and the second interference light detected by the detection unit.
申请公布号 JP2013145199(A) 申请公布日期 2013.07.25
申请号 JP20120006179 申请日期 2012.01.16
申请人 NIKON CORP 发明人 NAKAYAMA SHIGERU;TOBA HIDEMITSU;UDAGAWA SAORI;NISHIMURA KUMIKO
分类号 G01B9/02;G01B11/24 主分类号 G01B9/02
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