发明名称 Sawing Underfill in Packaging Processes
摘要 A method includes bonding a first and a second package component on a top surface of a third package component, and dispensing a polymer. The polymer includes a first portion in a space between the first and the third package components, a second portion in a space between the second and the third package components, and a third portion in a gap between the first and the second package components. A curing step is then performed on the polymer. After the curing step, the third portion of the polymer is sawed to form a trench between the first and the second package components.
申请公布号 US2013187258(A1) 申请公布日期 2013.07.25
申请号 US201213356173 申请日期 2012.01.23
申请人 LU SZU WEI;WANG YING-DA;KUO LI-CHUNG;LIN JING-CHENG;TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 LU SZU WEI;WANG YING-DA;KUO LI-CHUNG;LIN JING-CHENG
分类号 H01L27/06;H01L21/78 主分类号 H01L27/06
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