发明名称 |
SYSTEM FOR AND METHOD OF MONITORING FLOW THROUGH MASS FLOW CONTROLLERS IN REAL TIME |
摘要 |
<p>A mass flow controller comprises: a first flow meter constructed and arranged to measured flow rate of mass through the mass flow controller; a second flow meter constructed and arranged to measure flow rate of mass through the mass flow controller; a control valve constructed and arranged so as to control the flow rate of mass through the mass flow controller in response to a control signal generated as a function of the flow rate as measured by one of the flow meters; and a system controller constructed and arranged to generate the control signal, and to provide an indication when a difference between the flow rate of mass as measured by the first flow meter and the flow rate of mass as measured by the second flow meter exceeds a threshold.</p> |
申请公布号 |
WO2013109443(A1) |
申请公布日期 |
2013.07.25 |
申请号 |
WO2013US20790 |
申请日期 |
2013.01.09 |
申请人 |
MKS INSTRUMENTS, INC.;DING, JUNHUA |
发明人 |
DING, JUNHUA |
分类号 |
G01F25/00;G05D7/06 |
主分类号 |
G01F25/00 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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