发明名称 GAS MONITORING DEVICE
摘要 PROBLEM TO BE SOLVED: To provide a gas monitoring device capable of evaluating absorption strength of gas absorbed onto a crystal oscillator.SOLUTION: In a gas monitoring device 1 which comprises: a casing 2 which has an air introduction section 21, to introduce air to be a monitoring object or clean air, at one end and an air exhaust section 22, to exhaust the introduced air, at the other end; and a crystal oscillator 3 mounted inside the casing 2, the air to be the monitoring object and the clean air are alternately supplied to the air introduction section 21. By continuously obtaining a residual absorption amount of a substance remained on a surface of the crystal oscillator 3, absorption strength of the substance can be evaluated. Also, because the air to be the monitoring object is thoroughly contacted onto the entire surface of the crystal oscillator 3, the gas monitoring device 1 allows the substance to be the monitoring object to be effectively absorbed onto the crystal oscillator 3.
申请公布号 JP2013145249(A) 申请公布日期 2013.07.25
申请号 JP20130092599 申请日期 2013.04.25
申请人 SHIMIZU CORP 发明人 TANAKA ISAO
分类号 G01N5/02 主分类号 G01N5/02
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