METHOD FOR JOINING MATERIALS AND PLATE AND SHAFT DEVICE AND MULTI-LAYER PLATE FORMED THEREWITH

摘要

A method for joining first and second ceramic pieces comprising brazing a continuous layer of joining material between the two pieces. The wetting and flow of the joining material can be controlled by among other factors the selection of the joining material, the joining temperature, the time at temperature and the joining atmosphere. The pieces may be aluminum nitride and the pieces may be brazed with an aluminum alloy under controlled atmosphere. The joint material can be adapted to later withstand both the environments within a process chamber during substrate processing, and the oxygenated atmosphere which may be seen within the shaft of a heater or electrostatic chuck.