<p>Provided is a bulk acoustic wave resonator (BAWR). The BAWR may include an air cavity disposed on a substrate, a bulk acoustic wave resonant unit including a piezoelectric layer, and a reflective layer to reflect a wave of a resonant frequency that is generated from the piezoelectric layer.</p>
申请公布号
WO2013108965(A1)
申请公布日期
2013.07.25
申请号
WO2012KR04379
申请日期
2012.06.04
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
SHIN, JEA SHIK;KIM, DUCK HWAN;KIM, CHUL SOO;PARK, HO SOO;SON, SANG UK;SONG, IN SANG;LEE, MOON CHUL;CUI, JING
