发明名称 Crack-Arresting Structure for Through-Silicon Vias
摘要 The subject matter disclosed herein relates to structures formed on semiconductor chips that are used for at least partially addressing the thermally induced stresses and metallization system cracking problems in a semiconductor chip that may be caused by the presence of through-silicon vias (TSV's), and which may be due primarily to the significant differences in thermal expansion between the materials of the TSV's and the semiconductor-based materials that generally make up the remainder of the semiconductor chip. One device disclosed herein includes a substrate and a crack-arresting structure positioned above the substrate, the crack-arresting structure comprising a plurality of crack-arresting elements and having a perimeter when viewed from above. The device also includes a conductive structure positioned at least partially within the perimeter of the crack-arresting structure, and a conductive element extending through an opening in the crack-arresting structure, wherein the conductive element is conductively coupled to the conductive structure.
申请公布号 US2013187280(A1) 申请公布日期 2013.07.25
申请号 US201213357960 申请日期 2012.01.25
申请人 YUAN SHAONING;LU YUE KANG;LIM YEOW KHENG;TAN JUAN BOON;GLOBALFOUNDRIES SINGAPORE PTE LTD 发明人 YUAN SHAONING;LU YUE KANG;LIM YEOW KHENG;TAN JUAN BOON
分类号 H01L23/48 主分类号 H01L23/48
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