发明名称 SYSTEMS FOR FORMING PHOTOVOLTAIC CELLS ON FLEXIBLE SUBSTRATES
摘要 A deposition system for depositing a thin film photovoltaic cell on a flexible substrate comprises an enclosure that is fluidically isolated from an environment external to the enclosure, and a plurality of deposition chambers in the enclosure. At least one deposition chamber of the plurality of deposition chambers comprises a magnetron sputtering apparatus that directs a material flux of one or more target materials towards a portion of the flexible substrate that is disposed in the at least one deposition chamber of the plurality of deposition chambers. A substrate payout roller in the enclosure provides a flexible substrate that is directed through each of the plurality of deposition chambers to a substrate take-up roller in the enclosure. At least one guide roller in the enclosure is configured to direct the flexible substrate to or from a given deposition chamber among the plurality of deposition chambers.
申请公布号 WO2013109977(A1) 申请公布日期 2013.07.25
申请号 WO2013US22284 申请日期 2013.01.18
申请人 NUVOSUN, INC.;HACHTMANN, BRUCE, D.;BONIGUT, JOSEF;QIAN, QING;HOLLARS, DENNIS, R.;LIU, XIAODONG 发明人 HACHTMANN, BRUCE, D.;BONIGUT, JOSEF;QIAN, QING;HOLLARS, DENNIS, R.;LIU, XIAODONG
分类号 H01L31/18;H01L31/042 主分类号 H01L31/18
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