| 摘要 |
PROBLEM TO BE SOLVED: To provide an exhaust system for vacuum treatment apparatus capable of uniformly exhausting from a vacuum chamber without deviation corresponding to the volume of the vacuum chamber with a simple constitution, without requiring enlargement of the vacuum chamber.SOLUTION: Exhausting systems 6and 6for a vacuum treatment apparatus M includes a vacuum pump P and exhaust passages 61 and 16 provided in a multistage manner. A single inlet 60 provided to the vacuum pump acts as a connecting hole for the exhaust passage of the lowermost stage, and the number of the connecting holes 60, 62 and 15 of the exhaust passage in each stage is set by a geometric progression of 2(n is a natural number). The connecting hole 15 of the exhaust passage of the uppermost stage is used as an exhaust port opened on a wall surface of the vacuum chamber, respectively. The connecting hole of the exhaust passage right above a hole axis of the connecting hole of the lower stage is symmetrically provided. |
