发明名称 METHOD FOR PRODUCING MOLYBDENUM TARGET
摘要 Provided is a method by which a low-oxygen and high-density molybdenum target can be efficiently obtained, while fully utilizing the characteristics of each molybdenum (Mo) starting material powder. The present invention provides a method for producing a molybdenum target, wherein a mixed powder that is obtained by mixing a molybdenum powder A, which is prepared by reducing molybdenum oxide and then crushing the resulting so as to have an average particle diameter of 2-15 mum, and a molybdenum powder B, which is prepared by crushing a molybdenum bulk starting material having a density of not less than 6.64×10 (kg/m3) so as to have an average particle diameter of 50-2,000 mum, is sintered under pressure.
申请公布号 US2013189145(A1) 申请公布日期 2013.07.25
申请号 US201113825706 申请日期 2011.09.14
申请人 SAITOH KAZUYA;HATA TOMOYUKI;KAMINADA MASASHI;TAKASHIMA HIROSHI;HITACHI METALS, LTD. 发明人 SAITOH KAZUYA;HATA TOMOYUKI;KAMINADA MASASHI;TAKASHIMA HIROSHI
分类号 C23C14/14 主分类号 C23C14/14
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